Planar terahertz circuits using thin dielectric waveguides
In this paper, the use of polymer-ceramic nanocomposites in the fabrication of THz planar circuits at the wafer-level is introduced. Thin ribbon dielectric waveguides (50~60μm) made from SU-8 - Barium Titanate (BaTiO 3 ) composites are used in the fabrication of THz ribbon waveguides and circuits. D...
Gespeichert in:
Hauptverfasser: | , , , |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | In this paper, the use of polymer-ceramic nanocomposites in the fabrication of THz planar circuits at the wafer-level is introduced. Thin ribbon dielectric waveguides (50~60μm) made from SU-8 - Barium Titanate (BaTiO 3 ) composites are used in the fabrication of THz ribbon waveguides and circuits. Details of material characteristics, fabrication process and an example power splitter circuit are presented. |
---|---|
ISSN: | 2162-2027 |
DOI: | 10.1109/irmmw-THz.2011.6105221 |