Mechanical characterization of neural electrodes based on PDMS-parylene C-PDMS sandwiched system
Manufacturing of neural electrodes based on metal foil and silicone rubber using a laser is a simple and promising method. A handicap of such electrode arrays is the mechanical robustness of the thin metal tracks that connect the electrode sites with the interconnection pads. Embedding of structured...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | Manufacturing of neural electrodes based on metal foil and silicone rubber using a laser is a simple and promising method. A handicap of such electrode arrays is the mechanical robustness of the thin metal tracks that connect the electrode sites with the interconnection pads. Embedding of structured parylene C foil in silicone rubber turned out to be an interesting method to increase the robustness. Test samples with 12.5 μm thick platinum tracks and a 15 μm thick embedded and RIE-structured parylene C foil showed more than 800 % higher ultimate strength until breakage of the tracks. Different structured parylene C foil showed increasing robustness with increasing hole-spacing. |
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ISSN: | 1094-687X 1557-170X 1558-4615 |
DOI: | 10.1109/IEMBS.2011.6090142 |