Dual-adaptive feedforward control for raster tracking with applications to AFMs

We evaluate the performance of a dual-adaptive feedforward control architecture applied to the raster scan of a piezo-based positioning system. In previous work [1], we introduced the adaptive-delay algorithm that improved the tracking performance of the feedforward plant-injection architecture. The...

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Hauptverfasser: Butterworth, J. A., Pao, L. Y., Abramovitch, D. Y.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:We evaluate the performance of a dual-adaptive feedforward control architecture applied to the raster scan of a piezo-based positioning system. In previous work [1], we introduced the adaptive-delay algorithm that improved the tracking performance of the feedforward plant-injection architecture. The key benefit of the adaptive-delay algorithm is the adaptation calculation that does not require knowledge of plant parameters. In [1], the algorithm uses model-inverse-based feedforward control to increase raster-tracking bandwidth. It is well known that model-inverse-based feedforward control designs can perform poorly in the presence of large model variation or uncertainty. System identification methods reveal that the frequency response of our piezoscanner includes a large amount of variation as the user requests various operating points within the stage's range. As a result, tracking performance degrades as we vary from the conditions with which the model was identified. To correct for this, we combined the adaptive-delay algorithm with partial-parameter adaptation that updates critically variant parameters. This partnership of adaptive feedforward controllers improved experimental tracking results and robustness to model uncertainties.
ISSN:1085-1992
2576-3210
DOI:10.1109/CCA.2011.6044387