Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators

Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators

Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr,Ti)O 3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications.

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Bibliographische Detailangaben
Hauptverfasser: Kah How Koh, Kobayashi, T., Chengkuo Lee
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Actuators
Attenuation
Micromechanical devices
Mirrors
Optical attenuators
Optical device fabrication
Voltage measurement
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Beschreibung
Zusammenfassung:Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr,Ti)O 3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications.
ISSN:2166-8884
2166-8892