Electrical estimation of channel dopant uniformity using test MOSFET array

The dopant uniformity in an MOSFET channel is estimated using the test MOSFET array which includes many MOSFETs with different channel length. Takeuchi coefficient as a function of the channel length is calculated from the measured threshold voltage data. The electrical channel length as a function...

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Bibliographische Detailangaben

Hauptverfasser:	Terada, K., Sanai, K., Tsuji, K., Tsunomura, T., Nishida, A., Mogami, T.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Arrays Channel estimation Logic gates MOSFET circuits Resistance Threshold voltage Voltage measurement
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