MEMS technology development and manufacturing in a CMOS foundry

MEMS technology development and manufacturing in a CMOS foundry

MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process "phase-in" and internally developed "platform" are discussed. The latter is a TSMC-MEMS platform for motion sensors and other dev...

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Bibliographische Detailangaben
Hauptverfasser: Liu, C.M., Lin, Chung-Hsien, Chung, Tien-Kan, Chang, Kuei-Sung, Liu, Yi-Shao, Chou, Bruce C.S., Tsai, Robert Chin-Fu, Shen, Nick Y.M., Chen, Benior S.F., Cheng, Emerson C.W., Tuan, Hsiao Chin, Kalnitsky, Alex, Cheng, Sean
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Bonding
CMOS integrated circuits
CMOS-MEMS
MEMS Foundry Service
Micromechanical devices
Plasmas
Sensors
Silicon
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Beschreibung
Zusammenfassung:MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process "phase-in" and internally developed "platform" are discussed. The latter is a TSMC-MEMS platform for motion sensors and other devices.
ISSN:2159-547X
DOI:10.1109/TRANSDUCERS.2011.5969891