A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of...

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Bibliographische Detailangaben
Hauptverfasser:	Min-Woo Jang, Chia-Ling Chen, Partlo, W. E., Patil, S. R., Dongjin Lee, Zhijiang Ye, Lilja, D., Taton, T. A., Tianhong Cui, Campbell, S. A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	3-terminal fixed-fixed beam switch All-SWNT thin film Carbon nanotubes Conductivity Layer-by-layer assembly Logic gates Metals Self-assembly Switches
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Beschreibung
Zusammenfassung:	An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.
ISSN:	2159-547X
DOI:	10.1109/TRANSDUCERS.2011.5969607