Silicon microstructures: Fabrication and application

An overview of micromachining technologies for the fabrication of silicon microstructures will be given. Basic micromachining technologies such as various etching methods of silicon (isotropic, anisotropic; dry, wet) and etching of other important materials (Pyrex glass etc.), anodic bonding, etc. will be discussed. For an illustration of microstructures fabrication by micromachining procedures, a review of microstructures fabricated in LMSE such as micropumps and microreactors, together with their characteristics and applications, will be given.