Integration of Solar Cells on Top of CMOS Chips-Part II: CIGS Solar Cells
We present the monolithic integration of deep-submicrometer complementary metal-oxide-semiconductor (CMOS) microchips with copper indium gallium (di)selenide (CIGS) solar cells. Solar cells are manufactured directly on unpackaged CMOS chips. The microchips maintain comparable electronic performance,...
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| Veröffentlicht in: | IEEE transactions on electron devices 2011-08, Vol.58 (8), p.2620-2627 |
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| container_title | IEEE transactions on electron devices |
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| creator | Jiwu Lu Wei Liu Kovalgin, Alexey Y. Yun Sun Schmitz, Jurriaan |
| description | We present the monolithic integration of deep-submicrometer complementary metal-oxide-semiconductor (CMOS) microchips with copper indium gallium (di)selenide (CIGS) solar cells. Solar cells are manufactured directly on unpackaged CMOS chips. The microchips maintain comparable electronic performance, and the solar cells on top show an efficiency of 8.4 ± 0.8% and a yield of 84%, both values being close to the glass reference. The main integration issues, i.e., adhesion, surface topography, metal ion contamination, process temperature, and mechanical stress, can be resolved while maintaining standard photovoltaic processing. A tight process window is found for the manufacturing of CIGS solar cells on the CMOS side of the microchip. More process margin exists for backside integration. |
| doi_str_mv | 10.1109/TED.2011.2156799 |
| format | Article |
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Solar cells are manufactured directly on unpackaged CMOS chips. The microchips maintain comparable electronic performance, and the solar cells on top show an efficiency of 8.4 ± 0.8% and a yield of 84%, both values being close to the glass reference. The main integration issues, i.e., adhesion, surface topography, metal ion contamination, process temperature, and mechanical stress, can be resolved while maintaining standard photovoltaic processing. A tight process window is found for the manufacturing of CIGS solar cells on the CMOS side of the microchip. More process margin exists for backside integration.</description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/TED.2011.2156799</identifier><identifier>CODEN: IETDAI</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>ADHESION ; Adhesives ; Applied sciences ; CHIPS ; CIGS ; CMOS ; CMOS integrated circuits ; Complementary metal-oxide-semiconductor (CMOS) ; copper indium gallium selenide (CIGS) ; Copper indium gallium selenides ; Design. Technologies. Operation analysis. Testing ; ELECTRONIC PRODUCTS ; Electronics ; Energy ; energy harvesting ; Exact sciences and technology ; Glass ; Indium ; Integrated circuits ; monolithic integration ; Natural energy ; Optoelectronic devices ; photovoltaic (PV) cells ; Photovoltaic cells ; Photovoltaic conversion ; scavenging ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; SEMICONDUCTORS ; smart dust ; Solar cells ; Solar cells. Photoelectrochemical cells ; Solar energy ; Substrates ; Surface topography ; Topography</subject><ispartof>IEEE transactions on electron devices, 2011-08, Vol.58 (8), p.2620-2627</ispartof><rights>2015 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Aug 2011</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c468t-8ce100989273e42fc872226780619456385440d849a16e7a3a85d2b37e4694923</citedby><cites>FETCH-LOGICAL-c468t-8ce100989273e42fc872226780619456385440d849a16e7a3a85d2b37e4694923</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5937048$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5937048$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=24415828$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Jiwu Lu</creatorcontrib><creatorcontrib>Wei Liu</creatorcontrib><creatorcontrib>Kovalgin, Alexey Y.</creatorcontrib><creatorcontrib>Yun Sun</creatorcontrib><creatorcontrib>Schmitz, Jurriaan</creatorcontrib><title>Integration of Solar Cells on Top of CMOS Chips-Part II: CIGS Solar Cells</title><title>IEEE transactions on electron devices</title><addtitle>TED</addtitle><description>We present the monolithic integration of deep-submicrometer complementary metal-oxide-semiconductor (CMOS) microchips with copper indium gallium (di)selenide (CIGS) solar cells. Solar cells are manufactured directly on unpackaged CMOS chips. The microchips maintain comparable electronic performance, and the solar cells on top show an efficiency of 8.4 ± 0.8% and a yield of 84%, both values being close to the glass reference. The main integration issues, i.e., adhesion, surface topography, metal ion contamination, process temperature, and mechanical stress, can be resolved while maintaining standard photovoltaic processing. A tight process window is found for the manufacturing of CIGS solar cells on the CMOS side of the microchip. More process margin exists for backside integration.</description><subject>ADHESION</subject><subject>Adhesives</subject><subject>Applied sciences</subject><subject>CHIPS</subject><subject>CIGS</subject><subject>CMOS</subject><subject>CMOS integrated circuits</subject><subject>Complementary metal-oxide-semiconductor (CMOS)</subject><subject>copper indium gallium selenide (CIGS)</subject><subject>Copper indium gallium selenides</subject><subject>Design. Technologies. Operation analysis. Testing</subject><subject>ELECTRONIC PRODUCTS</subject><subject>Electronics</subject><subject>Energy</subject><subject>energy harvesting</subject><subject>Exact sciences and technology</subject><subject>Glass</subject><subject>Indium</subject><subject>Integrated circuits</subject><subject>monolithic integration</subject><subject>Natural energy</subject><subject>Optoelectronic devices</subject><subject>photovoltaic (PV) cells</subject><subject>Photovoltaic cells</subject><subject>Photovoltaic conversion</subject><subject>scavenging</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>SEMICONDUCTORS</subject><subject>smart dust</subject><subject>Solar cells</subject><subject>Solar cells. Photoelectrochemical cells</subject><subject>Solar energy</subject><subject>Substrates</subject><subject>Surface topography</subject><subject>Topography</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kU1Lw0AQhhdRsFbvgpcgiF5Sd_Z7vUmsNVCp0Hpe1nSjKWkSd9OD_97EliIePA0z88zLzLwInQMeAWB9uxg_jAgGGBHgQmp9gAbAuYy1YOIQDTAGFWuq6DE6CWHVpYIxMkBpWrXu3du2qKuozqN5XVofJa4sQ9RVFnXTV5Pn2TxKPoomxC_Wt1Ga3kVJOpn_xk_RUW7L4M52cYheH8eL5CmeziZpcj-NMyZUG6vMAcZaaSKpYyTPlCSECKmwAM24oIozhpeKaQvCSUut4kvyRqVjQjNN6BBdb3UbX39uXGjNughZt4GtXL0JRoPWICWojrz5lwQhoXsCwT16-Qdd1RtfdXcYJTWmlP1AeAtlvg7Bu9w0vlhb_2UAm94E05lgehPMzoRu5Gqna0Nmy9zbKivCfo4wBlyRXvpiyxXOuX2bayoxU_QbM9OJYA</recordid><startdate>20110801</startdate><enddate>20110801</enddate><creator>Jiwu Lu</creator><creator>Wei Liu</creator><creator>Kovalgin, Alexey Y.</creator><creator>Yun Sun</creator><creator>Schmitz, Jurriaan</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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| subjects | ADHESION Adhesives Applied sciences CHIPS CIGS CMOS CMOS integrated circuits Complementary metal-oxide-semiconductor (CMOS) copper indium gallium selenide (CIGS) Copper indium gallium selenides Design. Technologies. Operation analysis. Testing ELECTRONIC PRODUCTS Electronics Energy energy harvesting Exact sciences and technology Glass Indium Integrated circuits monolithic integration Natural energy Optoelectronic devices photovoltaic (PV) cells Photovoltaic cells Photovoltaic conversion scavenging Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices SEMICONDUCTORS smart dust Solar cells Solar cells. Photoelectrochemical cells Solar energy Substrates Surface topography Topography |
| title | Integration of Solar Cells on Top of CMOS Chips-Part II: CIGS Solar Cells |
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