A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-line architecture

A 16-Mb dynamic RAM has been designed and fabricated using 0.5- mu m CMOS technology with double-level metallization. It uses a novel trench-type surrounding high-capacitance cell (SCC) that measures only 3.3- mu m/sup 2/ in cell size with a 63-fF storage capacitance. A novel relaxed sense-amplifier...

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Veröffentlicht in:IEEE journal of solid-state circuits 1988-10, Vol.23 (5), p.1104-1112
Hauptverfasser: Inoue, M., Yamada, T., Kotani, H., Yamauchi, H., Fujiwara, A., Matsushima, J., Akamatsu, H., Fukumoto, M., Kubota, M., Nakao, I., Aoi, N., Fuse, G., Ogawa, S., Odanaka, S., Ueno, A., Yamamoto, H.
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container_end_page 1112
container_issue 5
container_start_page 1104
container_title IEEE journal of solid-state circuits
container_volume 23
creator Inoue, M.
Yamada, T.
Kotani, H.
Yamauchi, H.
Fujiwara, A.
Matsushima, J.
Akamatsu, H.
Fukumoto, M.
Kubota, M.
Nakao, I.
Aoi, N.
Fuse, G.
Ogawa, S.
Odanaka, S.
Ueno, A.
Yamamoto, H.
description A 16-Mb dynamic RAM has been designed and fabricated using 0.5- mu m CMOS technology with double-level metallization. It uses a novel trench-type surrounding high-capacitance cell (SCC) that measures only 3.3- mu m/sup 2/ in cell size with a 63-fF storage capacitance. A novel relaxed sense-amplifier-pitch (RSAP) open-bit-line architecture used on the DRAM achieves a high-density memory cell array, while maintaining a large enough layout pitch for the sense amplifier. These concepts allow the small chip that measures 5.4*17.38 (93.85) mm/sup 2/ to be mounted in a 300-mil dual-in-line package with 65-ns RAS access time and 35-ns column address access time.< >
doi_str_mv 10.1109/4.5931
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fullrecord <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_ieee_primary_5931</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5931</ieee_id><sourcerecordid>28728874</sourcerecordid><originalsourceid>FETCH-LOGICAL-c292t-36fccef338df3aa988f5738fbe3bee03f57d0110101cdc75878934f0031de8f73</originalsourceid><addsrcrecordid>eNqNkc1LAzEQxYMoWKuePeYg3lKTTbJJjqV-QqsgCt6WNDuhke3ummxR_3u3thQ8KXMYHvObB4-H0CmjI8aouRQjaTjbQwMmpSZM8dd9NKCUaWIySg_RUUpvvRRCswF6GGOWk9k8dPjqaTzDH6FbYIsjVPYTSpygTkDssq2CDxBJGzq3wE0LNelfSBVqwDa6RejAdasIx-jA2yrByXYP0cvN9fPkjkwfb-8n4ylxmck6wnPvHHjOdem5tUZrLxXXfg58DkB5r0rah-nHlU5JrbThwlPKWQnaKz5EFxvfNjbvK0hdsQzJQVXZGppVKjJDjRIy_xvUKtNaiX-ALDe_QBeblCL4oo1haeNXwWixLqAQxbqAHjzfOtrkbOWjrV1IOzo3TGi5xs42WACA3fXH4RsSsIqO</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>28169874</pqid></control><display><type>article</type><title>A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-line architecture</title><source>IEEE Electronic Library (IEL)</source><creator>Inoue, M. ; Yamada, T. ; Kotani, H. ; Yamauchi, H. ; Fujiwara, A. ; Matsushima, J. ; Akamatsu, H. ; Fukumoto, M. ; Kubota, M. ; Nakao, I. ; Aoi, N. ; Fuse, G. ; Ogawa, S. ; Odanaka, S. ; Ueno, A. ; Yamamoto, H.</creator><creatorcontrib>Inoue, M. ; Yamada, T. ; Kotani, H. ; Yamauchi, H. ; Fujiwara, A. ; Matsushima, J. ; Akamatsu, H. ; Fukumoto, M. ; Kubota, M. ; Nakao, I. ; Aoi, N. ; Fuse, G. ; Ogawa, S. ; Odanaka, S. ; Ueno, A. ; Yamamoto, H.</creatorcontrib><description>A 16-Mb dynamic RAM has been designed and fabricated using 0.5- mu m CMOS technology with double-level metallization. It uses a novel trench-type surrounding high-capacitance cell (SCC) that measures only 3.3- mu m/sup 2/ in cell size with a 63-fF storage capacitance. A novel relaxed sense-amplifier-pitch (RSAP) open-bit-line architecture used on the DRAM achieves a high-density memory cell array, while maintaining a large enough layout pitch for the sense amplifier. These concepts allow the small chip that measures 5.4*17.38 (93.85) mm/sup 2/ to be mounted in a 300-mil dual-in-line package with 65-ns RAS access time and 35-ns column address access time.&lt; &gt;</description><identifier>ISSN: 0018-9200</identifier><identifier>EISSN: 1558-173X</identifier><identifier>DOI: 10.1109/4.5931</identifier><identifier>CODEN: IJSCBC</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Bismuth ; Capacitance ; Capacitors ; CMOS technology ; DRAM chips ; Electronics ; Exact sciences and technology ; Fuses ; Integrated circuits ; Integrated circuits by function (including memories and processors) ; Packaging ; Random access memory ; Semiconductor device measurement ; Semiconductor device noise ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><ispartof>IEEE journal of solid-state circuits, 1988-10, Vol.23 (5), p.1104-1112</ispartof><rights>1990 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c292t-36fccef338df3aa988f5738fbe3bee03f57d0110101cdc75878934f0031de8f73</citedby><cites>FETCH-LOGICAL-c292t-36fccef338df3aa988f5738fbe3bee03f57d0110101cdc75878934f0031de8f73</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5931$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5931$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=6914851$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Inoue, M.</creatorcontrib><creatorcontrib>Yamada, T.</creatorcontrib><creatorcontrib>Kotani, H.</creatorcontrib><creatorcontrib>Yamauchi, H.</creatorcontrib><creatorcontrib>Fujiwara, A.</creatorcontrib><creatorcontrib>Matsushima, J.</creatorcontrib><creatorcontrib>Akamatsu, H.</creatorcontrib><creatorcontrib>Fukumoto, M.</creatorcontrib><creatorcontrib>Kubota, M.</creatorcontrib><creatorcontrib>Nakao, I.</creatorcontrib><creatorcontrib>Aoi, N.</creatorcontrib><creatorcontrib>Fuse, G.</creatorcontrib><creatorcontrib>Ogawa, S.</creatorcontrib><creatorcontrib>Odanaka, S.</creatorcontrib><creatorcontrib>Ueno, A.</creatorcontrib><creatorcontrib>Yamamoto, H.</creatorcontrib><title>A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-line architecture</title><title>IEEE journal of solid-state circuits</title><addtitle>JSSC</addtitle><description>A 16-Mb dynamic RAM has been designed and fabricated using 0.5- mu m CMOS technology with double-level metallization. It uses a novel trench-type surrounding high-capacitance cell (SCC) that measures only 3.3- mu m/sup 2/ in cell size with a 63-fF storage capacitance. A novel relaxed sense-amplifier-pitch (RSAP) open-bit-line architecture used on the DRAM achieves a high-density memory cell array, while maintaining a large enough layout pitch for the sense amplifier. These concepts allow the small chip that measures 5.4*17.38 (93.85) mm/sup 2/ to be mounted in a 300-mil dual-in-line package with 65-ns RAS access time and 35-ns column address access time.&lt; &gt;</description><subject>Applied sciences</subject><subject>Bismuth</subject><subject>Capacitance</subject><subject>Capacitors</subject><subject>CMOS technology</subject><subject>DRAM chips</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Fuses</subject><subject>Integrated circuits</subject><subject>Integrated circuits by function (including memories and processors)</subject><subject>Packaging</subject><subject>Random access memory</subject><subject>Semiconductor device measurement</subject><subject>Semiconductor device noise</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><issn>0018-9200</issn><issn>1558-173X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1988</creationdate><recordtype>article</recordtype><recordid>eNqNkc1LAzEQxYMoWKuePeYg3lKTTbJJjqV-QqsgCt6WNDuhke3ummxR_3u3thQ8KXMYHvObB4-H0CmjI8aouRQjaTjbQwMmpSZM8dd9NKCUaWIySg_RUUpvvRRCswF6GGOWk9k8dPjqaTzDH6FbYIsjVPYTSpygTkDssq2CDxBJGzq3wE0LNelfSBVqwDa6RejAdasIx-jA2yrByXYP0cvN9fPkjkwfb-8n4ylxmck6wnPvHHjOdem5tUZrLxXXfg58DkB5r0rah-nHlU5JrbThwlPKWQnaKz5EFxvfNjbvK0hdsQzJQVXZGppVKjJDjRIy_xvUKtNaiX-ALDe_QBeblCL4oo1haeNXwWixLqAQxbqAHjzfOtrkbOWjrV1IOzo3TGi5xs42WACA3fXH4RsSsIqO</recordid><startdate>19881001</startdate><enddate>19881001</enddate><creator>Inoue, M.</creator><creator>Yamada, T.</creator><creator>Kotani, H.</creator><creator>Yamauchi, H.</creator><creator>Fujiwara, A.</creator><creator>Matsushima, J.</creator><creator>Akamatsu, H.</creator><creator>Fukumoto, M.</creator><creator>Kubota, M.</creator><creator>Nakao, I.</creator><creator>Aoi, N.</creator><creator>Fuse, G.</creator><creator>Ogawa, S.</creator><creator>Odanaka, S.</creator><creator>Ueno, A.</creator><creator>Yamamoto, H.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><scope>8BQ</scope><scope>JG9</scope><scope>7TB</scope><scope>FR3</scope></search><sort><creationdate>19881001</creationdate><title>A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-line architecture</title><author>Inoue, M. ; Yamada, T. ; Kotani, H. ; Yamauchi, H. ; Fujiwara, A. ; Matsushima, J. ; Akamatsu, H. ; Fukumoto, M. ; Kubota, M. ; Nakao, I. ; Aoi, N. ; Fuse, G. ; Ogawa, S. ; Odanaka, S. ; Ueno, A. ; Yamamoto, H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c292t-36fccef338df3aa988f5738fbe3bee03f57d0110101cdc75878934f0031de8f73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1988</creationdate><topic>Applied sciences</topic><topic>Bismuth</topic><topic>Capacitance</topic><topic>Capacitors</topic><topic>CMOS technology</topic><topic>DRAM chips</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Fuses</topic><topic>Integrated circuits</topic><topic>Integrated circuits by function (including memories and processors)</topic><topic>Packaging</topic><topic>Random access memory</topic><topic>Semiconductor device measurement</topic><topic>Semiconductor device noise</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Inoue, M.</creatorcontrib><creatorcontrib>Yamada, T.</creatorcontrib><creatorcontrib>Kotani, H.</creatorcontrib><creatorcontrib>Yamauchi, H.</creatorcontrib><creatorcontrib>Fujiwara, A.</creatorcontrib><creatorcontrib>Matsushima, J.</creatorcontrib><creatorcontrib>Akamatsu, H.</creatorcontrib><creatorcontrib>Fukumoto, M.</creatorcontrib><creatorcontrib>Kubota, M.</creatorcontrib><creatorcontrib>Nakao, I.</creatorcontrib><creatorcontrib>Aoi, N.</creatorcontrib><creatorcontrib>Fuse, G.</creatorcontrib><creatorcontrib>Ogawa, S.</creatorcontrib><creatorcontrib>Odanaka, S.</creatorcontrib><creatorcontrib>Ueno, A.</creatorcontrib><creatorcontrib>Yamamoto, H.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>METADEX</collection><collection>Materials Research Database</collection><collection>Mechanical &amp; Transportation Engineering Abstracts</collection><collection>Engineering Research Database</collection><jtitle>IEEE journal of solid-state circuits</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Inoue, M.</au><au>Yamada, T.</au><au>Kotani, H.</au><au>Yamauchi, H.</au><au>Fujiwara, A.</au><au>Matsushima, J.</au><au>Akamatsu, H.</au><au>Fukumoto, M.</au><au>Kubota, M.</au><au>Nakao, I.</au><au>Aoi, N.</au><au>Fuse, G.</au><au>Ogawa, S.</au><au>Odanaka, S.</au><au>Ueno, A.</au><au>Yamamoto, H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-line architecture</atitle><jtitle>IEEE journal of solid-state circuits</jtitle><stitle>JSSC</stitle><date>1988-10-01</date><risdate>1988</risdate><volume>23</volume><issue>5</issue><spage>1104</spage><epage>1112</epage><pages>1104-1112</pages><issn>0018-9200</issn><eissn>1558-173X</eissn><coden>IJSCBC</coden><abstract>A 16-Mb dynamic RAM has been designed and fabricated using 0.5- mu m CMOS technology with double-level metallization. It uses a novel trench-type surrounding high-capacitance cell (SCC) that measures only 3.3- mu m/sup 2/ in cell size with a 63-fF storage capacitance. A novel relaxed sense-amplifier-pitch (RSAP) open-bit-line architecture used on the DRAM achieves a high-density memory cell array, while maintaining a large enough layout pitch for the sense amplifier. These concepts allow the small chip that measures 5.4*17.38 (93.85) mm/sup 2/ to be mounted in a 300-mil dual-in-line package with 65-ns RAS access time and 35-ns column address access time.&lt; &gt;</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/4.5931</doi><tpages>9</tpages></addata></record>
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identifier ISSN: 0018-9200
ispartof IEEE journal of solid-state circuits, 1988-10, Vol.23 (5), p.1104-1112
issn 0018-9200
1558-173X
language eng
recordid cdi_ieee_primary_5931
source IEEE Electronic Library (IEL)
subjects Applied sciences
Bismuth
Capacitance
Capacitors
CMOS technology
DRAM chips
Electronics
Exact sciences and technology
Fuses
Integrated circuits
Integrated circuits by function (including memories and processors)
Packaging
Random access memory
Semiconductor device measurement
Semiconductor device noise
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-line architecture
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-04T00%3A16%3A14IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%2016-Mbit%20DRAM%20with%20a%20relaxed%20sense-amplifier-pitch%20open-bit-line%20architecture&rft.jtitle=IEEE%20journal%20of%20solid-state%20circuits&rft.au=Inoue,%20M.&rft.date=1988-10-01&rft.volume=23&rft.issue=5&rft.spage=1104&rft.epage=1112&rft.pages=1104-1112&rft.issn=0018-9200&rft.eissn=1558-173X&rft.coden=IJSCBC&rft_id=info:doi/10.1109/4.5931&rft_dat=%3Cproquest_RIE%3E28728874%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=28169874&rft_id=info:pmid/&rft_ieee_id=5931&rfr_iscdi=true