Low on-resistance 1.2 kV 4H-SiC MOSFETs integrated with current sensor
4H-SiC MOSFETs integrated with a current sensor have been fabricated for the first time. The MOSFET shows superior characteristics with a specific on-resistance of 3.7 mΩcm 2 and a blocking voltage of 1.4 kV. The deviation of the current ratio (Imain/Isense) stays within 10% in the temperature range...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | 4H-SiC MOSFETs integrated with a current sensor have been fabricated for the first time. The MOSFET shows superior characteristics with a specific on-resistance of 3.7 mΩcm 2 and a blocking voltage of 1.4 kV. The deviation of the current ratio (Imain/Isense) stays within 10% in the temperature range between 25°C and 175°C, which is desirable for the current sensor of high power devices. Furthermore, the main current shut-off operation at an over-current detected using the current sensor has been demonstrated successfully. |
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ISSN: | 1063-6854 1946-0201 |
DOI: | 10.1109/ISPSD.2011.5890847 |