A versatile 30V analog CMOS process in a 0.18μm technology for power management application
A versatile 30V analog CMOS process in a 0.18 μm technology node has been developed by using cost-effective and modular fashion. To reduce the thermal budget deep NWELL isolation is formed after CMOS well formation. The drain-extended (DE) CMOS from 7V to 30V shows very competitive trade-off perform...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | A versatile 30V analog CMOS process in a 0.18 μm technology node has been developed by using cost-effective and modular fashion. To reduce the thermal budget deep NWELL isolation is formed after CMOS well formation. The drain-extended (DE) CMOS from 7V to 30V shows very competitive trade-off performance between the breakdown voltage and the specific on-resistance. In addition, low 1/f noise of 5V CMOS can be obtained by pure gate oxide process. |
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ISSN: | 1063-6854 1946-0201 |
DOI: | 10.1109/ISPSD.2011.5890830 |