InGaAs quantum well vertical-cavity surface-emitting lasers integration onto silicon substrates
Vertical-cavity surface-emitting lasers have been integrated onto silicon substrates using a new substrate removal process and low temperature PdGe contacts. A reduction in threshold current of 30% was observed for devices integrated onto silicon.
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | Vertical-cavity surface-emitting lasers have been integrated onto silicon substrates using a new substrate removal process and low temperature PdGe contacts. A reduction in threshold current of 30% was observed for devices integrated onto silicon. |
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DOI: | 10.1109/LEOS.1994.587003 |