Wafer charge neutralization systems-simulation and experiment

In this paper two-dimensional numerical modeling has been used to simulate the differences between electron and plasma flood systems in the physics of charging. In addition, the affects of the design of the Faraday system on the effectiveness of the flooding system have been discussed. To substantia...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mehta, S., Walther, S.R., Mack, M.E., Daniel, P., Che-Hoo Ng
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Electron beams Floods Ion beams Optical coupling Particle beams Plasma measurements Plasma simulation Plasma temperature Space charge Temperature distribution
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