Wafer charge neutralization systems-simulation and experiment

Wafer charge neutralization systems-simulation and experiment

In this paper two-dimensional numerical modeling has been used to simulate the differences between electron and plasma flood systems in the physics of charging. In addition, the affects of the design of the Faraday system on the effectiveness of the flooding system have been discussed. To substantia...

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Bibliographische Detailangaben
Hauptverfasser: Mehta, S., Walther, S.R., Mack, M.E., Daniel, P., Che-Hoo Ng
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Electron beams
Floods
Ion beams
Optical coupling
Particle beams
Plasma measurements
Plasma simulation
Plasma temperature
Space charge
Temperature distribution
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Beschreibung
Zusammenfassung:In this paper two-dimensional numerical modeling has been used to simulate the differences between electron and plasma flood systems in the physics of charging. In addition, the affects of the design of the Faraday system on the effectiveness of the flooding system have been discussed. To substantiate and supplement the simulations, measurements of floating potential using a real time charge sensor are compared to the simulation results for plasma potential.
DOI:10.1109/IIT.1996.586122