Flexural-plate-wave actuators based on PZT thin film

Flexural-plate-wave actuators based on PZT thin film

The fabrication and the characterization of a microfabricated acoustic Lamb wave device driven by a piezoelectric PZT (modified lead zirconate titanate) Pb(Zr/sub x/,Ti/sub 1-x/O/sub 3/) sol-gel thin film for use in mass transport, mass filtering and fluid delivery systems are presented. Ultrasonic...

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Bibliographische Detailangaben
Hauptverfasser: Luginbuhl, Ph, Collins, S.D., Racine, G.-A., Gretillat, M.-A., de Rooij, N.F., Brooks, K.G., Setter, N.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustic devices
Acoustic waves
Actuators
Fabrication
Filtering
Lead
Piezoelectric films
Thin film devices
Titanium compounds
Transistors
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Beschreibung
Zusammenfassung:The fabrication and the characterization of a microfabricated acoustic Lamb wave device driven by a piezoelectric PZT (modified lead zirconate titanate) Pb(Zr/sub x/,Ti/sub 1-x/O/sub 3/) sol-gel thin film for use in mass transport, mass filtering and fluid delivery systems are presented. Ultrasonic Flexural-Plate-Waves (FPW) at frequencies in the MHz order, are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDT) patterned on a 0.75 /spl mu/m thick piezoelectric ceramic PZT film which provides high acoustic power for physical translation of fluid and microparticles.
ISSN:1084-6999
DOI:10.1109/MEMSYS.1997.581845