Emitter diffusion method for extremely thin silicon wafers
The aim of this study is to optimize a low cost phosphorus diffusion process suitable for pn junction formation on extremely thin (
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| creator | Ochoa-Martínez, E Merchán, D Romero, R Gabás, M Martínez, L Martín, F Leinen, D Ramos-Barrado, J R Vázquez, C Hartiti, B |
| description | The aim of this study is to optimize a low cost phosphorus diffusion process suitable for pn junction formation on extremely thin ( |
| doi_str_mv | 10.1109/SCED.2011.5744189 |
| format | Conference Proceeding |
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| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 2163-4971 |
| ispartof | Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011, 2011, p.1-4 |
| issn | 2163-4971 2643-1300 |
| language | eng |
| recordid | cdi_ieee_primary_5744189 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | c-Si gettering phosphorus diffussion Photovoltaic cells Photovoltaic systems Resistance Silicon solar cells Solar energy spray coating Temperature measurement |
| title | Emitter diffusion method for extremely thin silicon wafers |
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