An electrochemical-cantilever platform for hybrid sensing applications

This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mecha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Fischer, L M, Dohn, S, Boisen, A, Tenje, M
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Copper Electric potential Electrodes Ions Sensors Stress Stress measurement
Online-Zugang:	Volltext bestellen
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