An electrochemical-cantilever platform for hybrid sensing applications

An electrochemical-cantilever platform for hybrid sensing applications

This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mecha...

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Bibliographische Detailangaben
Hauptverfasser: Fischer, L M, Dohn, S, Boisen, A, Tenje, M
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Copper
Electric potential
Electrodes
Ions
Sensors
Stress
Stress measurement
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Beschreibung
Zusammenfassung:This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mechanical and electrochemical performance is investigated. Lastly, a cantilever is "defunctionalized" in situ to create a reference cantilever for differential measurements in detection of Cu 2+ ions at concentrations of 10 μM and 100 nM.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2011.5734554