A 22-ns 1-Mbit CMOS high-speed DRAM with address multiplexing

Describes a 1-Mbit high-speed DRAM (HSDRAM), which has a nominal random access time of less than 27 ns and a column access time of 12 ns with address multiplexing. A double-polysilicon double-metal CMOS technology having PMOS arrays inside n-wells was developed with an average 1.3- mu m feature size. The chip has also been fabricated in a 0.9*shrunken version with an area of 67 mm/sup 2/, showing a 22-ns access time. The chip power consumption is lower than 500 mW at 60-ns cycle time. This HSDRAM, which provides SRAM-like speed while retaining DRAM-like density, allows DRAMs to be used in a broad new range of applications.< >