Electroluminescence from a-SiNx:H/SiO2 multilayers using lateral carrier injection
We report the observation of photoluminescence (PL) and electroluminescence (EL) from a-SiN x :H/SiO 2 multilayer structures. The luminescence intensity is improved by a thermal annealing process. A new method of effective current injection has been implemented for electrical excitation of these str...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | We report the observation of photoluminescence (PL) and electroluminescence (EL) from a-SiN x :H/SiO 2 multilayer structures. The luminescence intensity is improved by a thermal annealing process. A new method of effective current injection has been implemented for electrical excitation of these structures whereby the electric field is applied parallel to the plane of the multilayers. Such structures are promising as Si based light sources for Si optoelectronics technology. |
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DOI: | 10.1109/PGC.2010.5705975 |