A fast and low actuation voltage MEMS switch for mm-wave and its integration

A novel mm-wave MEMS single pole single throw (SPST) switch has been developed, which is driven by 5.0 V in 10.3 μs. The insertion loss and the isolation at 60 GHz were 1.2 dB and 18 dB, respectively. A two metal layer silicon interposer technology was also developed. We designed single pole double...

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Bibliographische Detailangaben

Hauptverfasser:	Akiba, A, Mitarai, S, Morita, S, Ikeda, K, Kurth, S, Leidich, S, Bertz, A, Nowack, M, Froemel, J, Gessner, T
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Contacts Electrodes Metals Silicon Substrates Switches
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