Submicron low-voltage organic transistors and circuits enabled by high-resolution silicon stencil masks

Using high-resolution silicon stencil masks and employing a resist-free, solvent-free, low-temperature (90°C) fabrication process we have fabricated low-voltage top-contact organic thin-film transistors (TFTs) with a channel length down to 0.8 μm. To observe the scaling requirements and to alleviate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ante, F, Letzkus, F, Butschke, J, Zschieschang, U, Kern, K, Burghartz, J N, Klauk, H
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Fabrication Inverters Lithography Logic gates Silicon Thin film transistors Threshold voltage
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