Integrated optical light directing structures in CMOS to improve light extraction efficiency

The directionality and external optical power of CMOS light sources was improved a factor 3.9 by implementing integrated light reflectors in an unmodified CMOS process. Implementing such reflectors successfully demonstrated a CMOS micro-display and a 350 MHz Si optical communication link.

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Bibliographische Detailangaben
Hauptverfasser:	Bogalecki, A W, du Plessis, M, Venter, P J, Nell, I J, Goosen, M E
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	CMOS external optical power CMOS integrated circuits CMOS light extraction efficiency Integrated light reflector Integrated optics Light sources Metals Optical reflection Optical variables measurement Si light source Silicon
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Beschreibung
Zusammenfassung:	The directionality and external optical power of CMOS light sources was improved a factor 3.9 by implementing integrated light reflectors in an unmodified CMOS process. Implementing such reflectors successfully demonstrated a CMOS micro-display and a 350 MHz Si optical communication link.
ISSN:	2159-1660
DOI:	10.1109/ICM.2010.5696106