MOEMS acoustic sensors for Structural Health Monitoring

MOEMS acoustic sensors for Structural Health Monitoring

MOEMS (Micro-Opto-Electro-Mechanical Systems) acoustic sensors are employed to detect acoustic emissions (AE) for Structural Health Monitoring (SHM). Acoustic sensing cantilevers (~200 × 100 × 50 μm) with variable frequency response, directionality and dynamic range can be fabricated in large quanti...

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Bibliographische Detailangaben
Hauptverfasser: Yang Zhang, Tsai, Jonas, Guann-Pyng Li, Feng, Maria Q, Bachman, Mark
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustic sensors
Acoustics
Concrete
Optical fiber sensors
Optical fibers
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Beschreibung
Zusammenfassung:MOEMS (Micro-Opto-Electro-Mechanical Systems) acoustic sensors are employed to detect acoustic emissions (AE) for Structural Health Monitoring (SHM). Acoustic sensing cantilevers (~200 × 100 × 50 μm) with variable frequency response, directionality and dynamic range can be fabricated in large quantity using a novel non-silicon process. The packaged sensors are low-cost, easy-to-install and EMI free during operation. The acoustic sensors' broadband sensitivity is demonstrated by standard structural break tests.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2010.5690794