Multi-axis integrated CMOS-MEMS inertial sensors

Multi-axis integrated CMOS-MEMS inertial sensors

Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis...

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Bibliographische Detailangaben
Hauptverfasser: Huikai Xie, Hongzhi Sun, Kemiao Jia, Deyou Fang, Hongwei Qu
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Accelerometers
CMOS integrated circuits
Gyroscopes
Metals
Microstructure
Sensors
Silicon
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Beschreibung
Zusammenfassung:Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.
DOI:10.1109/ICSICT.2010.5667618