A low-noise interface circuit for MEMS vibratory gyroscope

A CMOS ASIC has been designed and implemented for readout and control of MEMS vibratory gyroscopes. A low noise design is achieved by using the technique of sinusoidal chopper stabilization with a chopping frequency of 2MHz, which will effectively suppress the low frequency noise. A closed loop control method in driving mode is presented. The Chip is fabricated in a 0.35μm standard CMOS process with an area of 2.5×2.5mm 2 . The test is performed with a vibratory gyroscope on the condition of closed-loop control, and the measurement result shows a detecting resolution of 6aF in 100Hz bandwidth from a single 5V supply.