Birefringence characterization on SOI waveguide using optical low coherence interferometry

An optical low-coherence interferometry was utilized to characterize the birefringence on 5-μm thick silicon-on-insulator waveguides. The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10 -3 waveguide birefringence with 5-μm width and 2.5-μm etch depth.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Shih-Hsiang Hsu, Sheng-Chieh Tseng, Hui-Zhi You
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!