Birefringence characterization on SOI waveguide using optical low coherence interferometry

Birefringence characterization on SOI waveguide using optical low coherence interferometry

An optical low-coherence interferometry was utilized to characterize the birefringence on 5-μm thick silicon-on-insulator waveguides. The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10 -3 waveguide birefringence with 5-μm width and 2.5-μm etch depth.

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Bibliographische Detailangaben
Hauptverfasser: Shih-Hsiang Hsu, Sheng-Chieh Tseng, Hui-Zhi You
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Birefringence
Coherence interferometry
Effective index
Optical fiber sensors
Optical fibers
Optical interferometry
Optical polarization
Optical waveguides
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Beschreibung
Zusammenfassung:An optical low-coherence interferometry was utilized to characterize the birefringence on 5-μm thick silicon-on-insulator waveguides. The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10 -3 waveguide birefringence with 5-μm width and 2.5-μm etch depth.
ISSN:1949-2081
1949-209X
DOI:10.1109/GROUP4.2010.5643365