Birefringence characterization on SOI waveguide using optical low coherence interferometry
An optical low-coherence interferometry was utilized to characterize the birefringence on 5-μm thick silicon-on-insulator waveguides. The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10 -3 waveguide birefringence with 5-μm width and 2.5-μm etch depth.
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| creator | Shih-Hsiang Hsu Sheng-Chieh Tseng Hui-Zhi You |
| description | An optical low-coherence interferometry was utilized to characterize the birefringence on 5-μm thick silicon-on-insulator waveguides. The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10 -3 waveguide birefringence with 5-μm width and 2.5-μm etch depth. |
| doi_str_mv | 10.1109/GROUP4.2010.5643365 |
| format | Conference Proceeding |
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The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10 -3 waveguide birefringence with 5-μm width and 2.5-μm etch depth.</description><subject>Birefringence</subject><subject>Coherence interferometry</subject><subject>Effective index</subject><subject>Optical fiber sensors</subject><subject>Optical fibers</subject><subject>Optical interferometry</subject><subject>Optical polarization</subject><subject>Optical waveguides</subject><issn>1949-2081</issn><issn>1949-209X</issn><isbn>1424463440</isbn><isbn>9781424463442</isbn><isbn>9781424463459</isbn><isbn>1424463467</isbn><isbn>1424463459</isbn><isbn>9781424463466</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo9UN1OwjAYrX-JiDwBN32BYb-uHe2lEkUSEoxKYrwhH91XqBkb6YYEn95F0eQkJzl_F4exPogBgLA34-fZ_EkNpGgFnak0zfQJ69mhASWVylKl7SnrgFU2kcK-nbGrP0OJ83_DwCXr1fWHEAKkyaQRHfZ-FyL5GMoVlY64W2NE11AMX9iEquQtXmYTvsdPWu1CTnxXt1lebZvgsOBFteeuWlP8aYeybXqK1YaaeLhmFx6LmnpH7rL5w_3r6DGZzsaT0e00CTDUTYIqx2UuPeQoMyDQVqLXWioEPXTWWOGsF94a1EvlUgMCc5JOudxBRlKkXdb_3Q1EtNjGsMF4WBxvSr8Bdp9Z4w</recordid><startdate>201009</startdate><enddate>201009</enddate><creator>Shih-Hsiang Hsu</creator><creator>Sheng-Chieh Tseng</creator><creator>Hui-Zhi You</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201009</creationdate><title>Birefringence characterization on SOI waveguide using optical low coherence interferometry</title><author>Shih-Hsiang Hsu ; Sheng-Chieh Tseng ; Hui-Zhi You</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-a4dabd2f1da261e1592af5524a157c9890c9f0f98a5b4c3810ade2c4cdc16e203</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Birefringence</topic><topic>Coherence interferometry</topic><topic>Effective index</topic><topic>Optical fiber sensors</topic><topic>Optical fibers</topic><topic>Optical interferometry</topic><topic>Optical polarization</topic><topic>Optical waveguides</topic><toplevel>online_resources</toplevel><creatorcontrib>Shih-Hsiang Hsu</creatorcontrib><creatorcontrib>Sheng-Chieh Tseng</creatorcontrib><creatorcontrib>Hui-Zhi You</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Shih-Hsiang Hsu</au><au>Sheng-Chieh Tseng</au><au>Hui-Zhi You</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Birefringence characterization on SOI waveguide using optical low coherence interferometry</atitle><btitle>7th IEEE International Conference on Group IV Photonics</btitle><stitle>GROUP4</stitle><date>2010-09</date><risdate>2010</risdate><spage>249</spage><epage>251</epage><pages>249-251</pages><issn>1949-2081</issn><eissn>1949-209X</eissn><isbn>1424463440</isbn><isbn>9781424463442</isbn><eisbn>9781424463459</eisbn><eisbn>1424463467</eisbn><eisbn>1424463459</eisbn><eisbn>9781424463466</eisbn><abstract>An optical low-coherence interferometry was utilized to characterize the birefringence on 5-μm thick silicon-on-insulator waveguides. The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10 -3 waveguide birefringence with 5-μm width and 2.5-μm etch depth.</abstract><pub>IEEE</pub><doi>10.1109/GROUP4.2010.5643365</doi><tpages>3</tpages></addata></record> |
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| ispartof | 7th IEEE International Conference on Group IV Photonics, 2010, p.249-251 |
| issn | 1949-2081 1949-209X |
| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Birefringence Coherence interferometry Effective index Optical fiber sensors Optical fibers Optical interferometry Optical polarization Optical waveguides |
| title | Birefringence characterization on SOI waveguide using optical low coherence interferometry |
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