Modelling of trapping mechanism in MEMS switches

Modelling of trapping mechanism in MEMS switches

Micro-electromechanical System (MEMS) is a batch fabricated (micro-fabricated) system that contains both electrical and mechanical components. The devices are known to be unstable in there performances due to reliability concerns, trapping mechanism in dielectric is one of the major cause for the re...

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Bibliographische Detailangaben
Hauptverfasser: Dekate, K N, Gupta, A, Pande, R S
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Centroid
dielectric
Dielectrics
Electron traps
Equations
Mathematical model
MEMS
Micromechanical devices
MIM
Silicon Nitride (Si 3 N 4 )
Switch
Switches
trapping
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Beschreibung
Zusammenfassung:Micro-electromechanical System (MEMS) is a batch fabricated (micro-fabricated) system that contains both electrical and mechanical components. The devices are known to be unstable in there performances due to reliability concerns, trapping mechanism in dielectric is one of the major cause for the reliability issue, modelling of these traps can help to improve stiction occurring in dielectric. With the help of first order kinetic equation it can be possible to determine number of traps. A Model is constructed to predict the amount of charge trapped into the silicon nitride (Si3N4) of the capacitive MEMS Switch.
DOI:10.1109/ICCCT.2010.5640453