Porous silicon gettering

We have studied a novel extrinsic gettering method that uses the large surface areas produced by a porous-silicon etch as gettering sites. The annealing step of the gettering used a high-flux solar furnace. We found that a high density of photons during annealing enhanced the impurity diffusion to t...

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Hauptverfasser: Tsuo, Y.S., Menna, P., Pitts, J.R., Jantzen, K.R., Asher, S.E., Al-Jassim, M.M., Ciszek, T.F.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:We have studied a novel extrinsic gettering method that uses the large surface areas produced by a porous-silicon etch as gettering sites. The annealing step of the gettering used a high-flux solar furnace. We found that a high density of photons during annealing enhanced the impurity diffusion to the gettering sites. We used metallurgical-grade Si (MG-Si) prepared by directional solidification casting as the starting material. We propose to use porous-silicon-gettered MG-Si as a low-cost epitaxial substrate for polycrystalline silicon thin-film growth for solar cells.
ISSN:0160-8371
DOI:10.1109/PVSC.1996.564043