Simultaneous topographic and thermal imaging of silicon nanowires using a new SThM probe

In Scanning Thermal Microscopy (SThM) techniques, the probe, and more particularly the tip, plays a major role in the spatial resolution limitation and in the acquisition speed. We present a new commercial resistive SThM probe constituted of a Palladium (Pd) film on a SiO 2 substrate. We first descr...

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Bibliographische Detailangaben

Hauptverfasser:	Puyoo, E, Grauby, S, Rampnoux, J, Claeys, W, Rouviere, E, Dilhaire, S
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Heating Nanowires Probes Resistance Spatial resolution Temperature measurement Thermal conductivity
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