Simultaneous topographic and thermal imaging of silicon nanowires using a new SThM probe
In Scanning Thermal Microscopy (SThM) techniques, the probe, and more particularly the tip, plays a major role in the spatial resolution limitation and in the acquisition speed. We present a new commercial resistive SThM probe constituted of a Palladium (Pd) film on a SiO 2 substrate. We first descr...
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Zusammenfassung: | In Scanning Thermal Microscopy (SThM) techniques, the probe, and more particularly the tip, plays a major role in the spatial resolution limitation and in the acquisition speed. We present a new commercial resistive SThM probe constituted of a Palladium (Pd) film on a SiO 2 substrate. We first describe its geometry and electrical properties. Then, we present topographic and thermal images of silicon nanowires, which show the very good spatial resolution ( |
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