Simultaneous topographic and thermal imaging of silicon nanowires using a new SThM probe

In Scanning Thermal Microscopy (SThM) techniques, the probe, and more particularly the tip, plays a major role in the spatial resolution limitation and in the acquisition speed. We present a new commercial resistive SThM probe constituted of a Palladium (Pd) film on a SiO 2 substrate. We first descr...

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Hauptverfasser: Puyoo, E, Grauby, S, Rampnoux, J, Claeys, W, Rouviere, E, Dilhaire, S
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:In Scanning Thermal Microscopy (SThM) techniques, the probe, and more particularly the tip, plays a major role in the spatial resolution limitation and in the acquisition speed. We present a new commercial resistive SThM probe constituted of a Palladium (Pd) film on a SiO 2 substrate. We first describe its geometry and electrical properties. Then, we present topographic and thermal images of silicon nanowires, which show the very good spatial resolution (