Modeling of XeCl excilamps, taking into account of process of halogen regeneration
Kinetic model for XeCl*-molecules active medium of an excilamps, taking into account of the halide donors (HCl, Cl 2 ) regeneration process is presented. Conditions being discussed, when XeCl*-molecules formation and the regeneration dynamics of the halide donors are possible to consider separately.
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Hauptverfasser: | , , |
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | Kinetic model for XeCl*-molecules active medium of an excilamps, taking into account of the halide donors (HCl, Cl 2 ) regeneration process is presented. Conditions being discussed, when XeCl*-molecules formation and the regeneration dynamics of the halide donors are possible to consider separately. |
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ISSN: | 2160-1518 2160-1534 |
DOI: | 10.1109/CAOL.2010.5634199 |