Beam shaping - the key to high throughput selective emitter laser processing with a single laser system

Beam shaping - the key to high throughput selective emitter laser processing with a single laser system

The fabrication of selective emitters by laser processing has attracted the interest of researchers in recent years. However, narrow foci of Gaussian laser beams limit the throughput and feature an inhomogeneous intensity distribution on the wafer. The use of beam shaping can eliminate this setback....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jager, U, Oesterlin, P, Kimmerle, A, Preu, R
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Doping
Fingers
Laser beams
Measurement by laser beam
Resistance
Surface emitting lasers
Surface treatment
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Beschreibung
Zusammenfassung:The fabrication of selective emitters by laser processing has attracted the interest of researchers in recent years. However, narrow foci of Gaussian laser beams limit the throughput and feature an inhomogeneous intensity distribution on the wafer. The use of beam shaping can eliminate this setback. A single laser system delivering
ISSN:0160-8371
DOI:10.1109/PVSC.2010.5614400