Wafer-bonded Ge:Ga blocked-impurity-band far-infrared detectors
We report a successful fabrication of a far-infrared blocked-impurity-band (BIB) detector. We achieve a clear boundary interface between an absorption layer and a blocking layer with a transition layer of 8 nm thick by bonding two discrete germanium wafers using surface activated bonding (SAB) techn...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | We report a successful fabrication of a far-infrared blocked-impurity-band (BIB) detector. We achieve a clear boundary interface between an absorption layer and a blocking layer with a transition layer of 8 nm thick by bonding two discrete germanium wafers using surface activated bonding (SAB) technique. As the results, a good responsivity of ~7 A/W at 2 K has been achieved with extended cutoff wavelength compared to a conventional Ge:Ga photoconductor detector. |
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ISSN: | 2162-2027 |
DOI: | 10.1109/ICIMW.2010.5612767 |