Wafer-bonded Ge:Ga blocked-impurity-band far-infrared detectors

We report a successful fabrication of a far-infrared blocked-impurity-band (BIB) detector. We achieve a clear boundary interface between an absorption layer and a blocking layer with a transition layer of 8 nm thick by bonding two discrete germanium wafers using surface activated bonding (SAB) techn...

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Hauptverfasser: Sawayama, Yoshihiro, Yasuo Doi, Kurayama, Ryuji, Higurashi, Eiji, Patrashin, Mikhail, Hosako, Iwao
Format: Tagungsbericht
Sprache:eng
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Beschreibung
Zusammenfassung:We report a successful fabrication of a far-infrared blocked-impurity-band (BIB) detector. We achieve a clear boundary interface between an absorption layer and a blocking layer with a transition layer of 8 nm thick by bonding two discrete germanium wafers using surface activated bonding (SAB) technique. As the results, a good responsivity of ~7 A/W at 2 K has been achieved with extended cutoff wavelength compared to a conventional Ge:Ga photoconductor detector.
ISSN:2162-2027
DOI:10.1109/ICIMW.2010.5612767