Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications
Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 2 |
|---|---|
| container_issue | |
| container_start_page | 1 |
| container_title | |
| container_volume | |
| creator | Matvejev, V De Tandt, C Ranson, W Stiens, J |
| description | Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH. |
| doi_str_mv | 10.1109/ICIMW.2010.5612337 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5612337</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5612337</ieee_id><sourcerecordid>5612337</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-e6736fa7055a55f9d79ed65a83a082d759946046390d56f4526523afd37a62ce3</originalsourceid><addsrcrecordid>eNpVkM1Kw0AUhUdUsNS-gG7mBVLn797pLCWoLVTcVIqrcs1M6miahExqsU9vwG5cHT7O4Vscxm6kmEop3N0iXzyvp0oMDCiV1vaMTZydSaOMQQTE838M7oKNlESVKaHsFZuk9CmE0EpoZ9yIva1Dz1OsYtHU_H1fffFdLLpmR8VHrIPnq_mRH-g7bPfRh8TLpuNVc8iqJiUe6z5sO-qHWQp1Gipq28FEfWzqdM0uS6pSmJxyzF4fH1b5PFu-PC3y-2UWpYU-C2g1lmQFAAGUzlsXPALNNImZ8hacMygMaic8YGlAIShNpdeWUBVBj9ntnzeGEDZtF3fU_WxO5-hfcERWWg</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Matvejev, V ; De Tandt, C ; Ranson, W ; Stiens, J</creator><creatorcontrib>Matvejev, V ; De Tandt, C ; Ranson, W ; Stiens, J</creatorcontrib><description>Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.</description><identifier>ISSN: 2162-2027</identifier><identifier>ISBN: 9781424466559</identifier><identifier>ISBN: 1424466555</identifier><identifier>EISBN: 9781424466566</identifier><identifier>EISBN: 1424466563</identifier><identifier>EISBN: 1424466571</identifier><identifier>EISBN: 9781424466573</identifier><identifier>DOI: 10.1109/ICIMW.2010.5612337</identifier><language>eng</language><publisher>IEEE</publisher><subject>Attenuation ; Electromagnetic waveguides ; Etching ; Micromachining ; Rough surfaces ; Silicon ; Surface roughness</subject><ispartof>35th International Conference on Infrared, Millimeter, and Terahertz Waves, 2010, p.1-2</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5612337$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27904,54898</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5612337$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Matvejev, V</creatorcontrib><creatorcontrib>De Tandt, C</creatorcontrib><creatorcontrib>Ranson, W</creatorcontrib><creatorcontrib>Stiens, J</creatorcontrib><title>Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications</title><title>35th International Conference on Infrared, Millimeter, and Terahertz Waves</title><addtitle>ICIMW</addtitle><description>Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.</description><subject>Attenuation</subject><subject>Electromagnetic waveguides</subject><subject>Etching</subject><subject>Micromachining</subject><subject>Rough surfaces</subject><subject>Silicon</subject><subject>Surface roughness</subject><issn>2162-2027</issn><isbn>9781424466559</isbn><isbn>1424466555</isbn><isbn>9781424466566</isbn><isbn>1424466563</isbn><isbn>1424466571</isbn><isbn>9781424466573</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpVkM1Kw0AUhUdUsNS-gG7mBVLn797pLCWoLVTcVIqrcs1M6miahExqsU9vwG5cHT7O4Vscxm6kmEop3N0iXzyvp0oMDCiV1vaMTZydSaOMQQTE838M7oKNlESVKaHsFZuk9CmE0EpoZ9yIva1Dz1OsYtHU_H1fffFdLLpmR8VHrIPnq_mRH-g7bPfRh8TLpuNVc8iqJiUe6z5sO-qHWQp1Gipq28FEfWzqdM0uS6pSmJxyzF4fH1b5PFu-PC3y-2UWpYU-C2g1lmQFAAGUzlsXPALNNImZ8hacMygMaic8YGlAIShNpdeWUBVBj9ntnzeGEDZtF3fU_WxO5-hfcERWWg</recordid><startdate>201009</startdate><enddate>201009</enddate><creator>Matvejev, V</creator><creator>De Tandt, C</creator><creator>Ranson, W</creator><creator>Stiens, J</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201009</creationdate><title>Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications</title><author>Matvejev, V ; De Tandt, C ; Ranson, W ; Stiens, J</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-e6736fa7055a55f9d79ed65a83a082d759946046390d56f4526523afd37a62ce3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Attenuation</topic><topic>Electromagnetic waveguides</topic><topic>Etching</topic><topic>Micromachining</topic><topic>Rough surfaces</topic><topic>Silicon</topic><topic>Surface roughness</topic><toplevel>online_resources</toplevel><creatorcontrib>Matvejev, V</creatorcontrib><creatorcontrib>De Tandt, C</creatorcontrib><creatorcontrib>Ranson, W</creatorcontrib><creatorcontrib>Stiens, J</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Matvejev, V</au><au>De Tandt, C</au><au>Ranson, W</au><au>Stiens, J</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications</atitle><btitle>35th International Conference on Infrared, Millimeter, and Terahertz Waves</btitle><stitle>ICIMW</stitle><date>2010-09</date><risdate>2010</risdate><spage>1</spage><epage>2</epage><pages>1-2</pages><issn>2162-2027</issn><isbn>9781424466559</isbn><isbn>1424466555</isbn><eisbn>9781424466566</eisbn><eisbn>1424466563</eisbn><eisbn>1424466571</eisbn><eisbn>9781424466573</eisbn><abstract>Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.</abstract><pub>IEEE</pub><doi>10.1109/ICIMW.2010.5612337</doi><tpages>2</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 2162-2027 |
| ispartof | 35th International Conference on Infrared, Millimeter, and Terahertz Waves, 2010, p.1-2 |
| issn | 2162-2027 |
| language | eng |
| recordid | cdi_ieee_primary_5612337 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Attenuation Electromagnetic waveguides Etching Micromachining Rough surfaces Silicon Surface roughness |
| title | Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-27T23%3A36%3A46IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Wet%20silicon%20bulk%20micromachined%20THz%20waveguides%20for%20low-loss%20integrated%20sensor%20applications&rft.btitle=35th%20International%20Conference%20on%20Infrared,%20Millimeter,%20and%20Terahertz%20Waves&rft.au=Matvejev,%20V&rft.date=2010-09&rft.spage=1&rft.epage=2&rft.pages=1-2&rft.issn=2162-2027&rft.isbn=9781424466559&rft.isbn_list=1424466555&rft_id=info:doi/10.1109/ICIMW.2010.5612337&rft_dat=%3Cieee_6IE%3E5612337%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=9781424466566&rft.eisbn_list=1424466563&rft.eisbn_list=1424466571&rft.eisbn_list=9781424466573&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5612337&rfr_iscdi=true |