Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications

Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications

Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.

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Bibliographische Detailangaben
Hauptverfasser: Matvejev, V, De Tandt, C, Ranson, W, Stiens, J
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Attenuation
Electromagnetic waveguides
Etching
Micromachining
Rough surfaces
Silicon
Surface roughness
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Beschreibung
Zusammenfassung:Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.
ISSN:2162-2027
DOI:10.1109/ICIMW.2010.5612337