Dynamic modeling of five-bar manipulator with structurally flexible linkages

In this paper, we investigate a planar parallel mechanism called five-bar mechanism which is used in wire bonders of semiconductor packaging system where the required accuracy is about 2 (um), acceleration reaches 10-15 (g). However, the conventional modeling and analyzing methods that treat all components of the manipulator as rigid and ignore all possible deformations, definitely are insufficient to satisfy those rigorous demands. Thus, in this paper, the dynamic model with consideration of both rigid motion and flexible displacement is developed for the five-bar manipulator. Finite element and Lagrange's equation methods are used to get the mathematical model, Lagrange multiplier method is applied to deal with constraint equations. By comparing dynamic behavior of the system modeled by rigid bodies and flexible bodies, the proposed flexible model is well validated, meanwhile, some analysis from simulation results are given.