Customer-oriented product engineering of micro and nano devices

Customer-oriented product engineering of micro and nano devices

This paper discusses novel customer-oriented micro device product engineering methodology based on a real sample design of MEMS inertial sensor. The methodology supports multi-site product development. Virtual prototyping on a sample rapid virtual wafer run with extended customer support and feedbac...

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Bibliographische Detailangaben
Hauptverfasser: Bieniek, T, Janczyk, G, Grabiec, P, Szynka, J, Kalicinski, S, Janus, P, Domański, K, Sierakowski, A, Ekwińska, M, Szmigiel, D, Tomaszewski, D, Hölzer, G, Schröpfer, G
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitance
Corona
CORONA project
Fabrication
MEMS
Micromechanical devices
Product development
product development process
product engineering
Readout electronics
sensors
Silicon
virtual manufacturing
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Beschreibung
Zusammenfassung:This paper discusses novel customer-oriented micro device product engineering methodology based on a real sample design of MEMS inertial sensor. The methodology supports multi-site product development. Virtual prototyping on a sample rapid virtual wafer run with extended customer support and feedback are also discussed along with presentation of selected set of software tools involved. Visualization and verification with the real process of the MEMS inertial sensor fabrication is also presented.