Fabrication of a thin-film thermal converter with resistive sensing

A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO 2 ). This paper presents details of the fabrication process and materials selection.

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Hauptverfasser:	Di Lillo, L, Malatto, L, Giménez, G, Mangano, E, Fraigi, L, Laiz, H
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomembranes Bridge circuits Conductivity Fabrication Resistors Silicon Temperature sensors Thermal resistance Transistors Voltage
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creator	Di Lillo, L Malatto, L Giménez, G Mangano, E Fraigi, L Laiz, H
description	A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO 2 ). This paper presents details of the fabrication process and materials selection.
doi_str_mv	10.1109/CPEM.2010.5543788
format	Conference Proceeding
fullrecord	<record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5543788</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5543788</ieee_id><sourcerecordid>5543788</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-a77eaac4aec6b53e1a39773845a69cf48c875d09cf6a793100034d2fe709524e3</originalsourceid><addsrcrecordid>eNpVUMtOwzAQNC-JqOQDEBf_QIodP9Y-oqgtSEVw6L3aphtqlKTIjor4eyzRC3OZGY002h3G7qWYSyn8Y_O-eJ3XIltjtALnLljpwUlda23Bg71kRS2tqIQEefUvM_U1K4RxvpLamVtWpvQpMrSpJYiCNUvcxdDiFI4jP3Yc-XQIY9WFfsiK4oA9b4_jieJEkX-H6cAjpZCmcCKeaExh_LhjNx32icozz9hmudg0z9X6bfXSPK2r4MVUIQAhthqptTujSKLyAMppg9a3nXatA7MXWVoEr2Q-Uul93RGI_IUmNWMPf7WBiLZfMQwYf7bnRdQvvxZP0A</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Fabrication of a thin-film thermal converter with resistive sensing</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Di Lillo, L ; Malatto, L ; Giménez, G ; Mangano, E ; Fraigi, L ; Laiz, H</creator><creatorcontrib>Di Lillo, L ; Malatto, L ; Giménez, G ; Mangano, E ; Fraigi, L ; Laiz, H</creatorcontrib><description>A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO 2 ). This paper presents details of the fabrication process and materials selection.</description><identifier>ISSN: 0589-1485</identifier><identifier>ISBN: 9781424467952</identifier><identifier>ISBN: 1424467950</identifier><identifier>EISSN: 2160-0171</identifier><identifier>EISBN: 9781424467976</identifier><identifier>EISBN: 1424467977</identifier><identifier>EISBN: 9781424467969</identifier><identifier>EISBN: 1424467969</identifier><identifier>DOI: 10.1109/CPEM.2010.5543788</identifier><language>eng</language><publisher>IEEE</publisher><subject>Biomembranes ; Bridge circuits ; Conductivity ; Fabrication ; Resistors ; Silicon ; Temperature sensors ; Thermal resistance ; Transistors ; Voltage</subject><ispartof>CPEM 2010, 2010, p.163-164</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5543788$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2051,27904,54899</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5543788$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Di Lillo, L</creatorcontrib><creatorcontrib>Malatto, L</creatorcontrib><creatorcontrib>Giménez, G</creatorcontrib><creatorcontrib>Mangano, E</creatorcontrib><creatorcontrib>Fraigi, L</creatorcontrib><creatorcontrib>Laiz, H</creatorcontrib><title>Fabrication of a thin-film thermal converter with resistive sensing</title><title>CPEM 2010</title><addtitle>CPEM</addtitle><description>A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO 2 ). This paper presents details of the fabrication process and materials selection.</description><subject>Biomembranes</subject><subject>Bridge circuits</subject><subject>Conductivity</subject><subject>Fabrication</subject><subject>Resistors</subject><subject>Silicon</subject><subject>Temperature sensors</subject><subject>Thermal resistance</subject><subject>Transistors</subject><subject>Voltage</subject><issn>0589-1485</issn><issn>2160-0171</issn><isbn>9781424467952</isbn><isbn>1424467950</isbn><isbn>9781424467976</isbn><isbn>1424467977</isbn><isbn>9781424467969</isbn><isbn>1424467969</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpVUMtOwzAQNC-JqOQDEBf_QIodP9Y-oqgtSEVw6L3aphtqlKTIjor4eyzRC3OZGY002h3G7qWYSyn8Y_O-eJ3XIltjtALnLljpwUlda23Bg71kRS2tqIQEefUvM_U1K4RxvpLamVtWpvQpMrSpJYiCNUvcxdDiFI4jP3Yc-XQIY9WFfsiK4oA9b4_jieJEkX-H6cAjpZCmcCKeaExh_LhjNx32icozz9hmudg0z9X6bfXSPK2r4MVUIQAhthqptTujSKLyAMppg9a3nXatA7MXWVoEr2Q-Uul93RGI_IUmNWMPf7WBiLZfMQwYf7bnRdQvvxZP0A</recordid><startdate>201006</startdate><enddate>201006</enddate><creator>Di Lillo, L</creator><creator>Malatto, L</creator><creator>Giménez, G</creator><creator>Mangano, E</creator><creator>Fraigi, L</creator><creator>Laiz, H</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201006</creationdate><title>Fabrication of a thin-film thermal converter with resistive sensing</title><author>Di Lillo, L ; Malatto, L ; Giménez, G ; Mangano, E ; Fraigi, L ; Laiz, H</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-a77eaac4aec6b53e1a39773845a69cf48c875d09cf6a793100034d2fe709524e3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Biomembranes</topic><topic>Bridge circuits</topic><topic>Conductivity</topic><topic>Fabrication</topic><topic>Resistors</topic><topic>Silicon</topic><topic>Temperature sensors</topic><topic>Thermal resistance</topic><topic>Transistors</topic><topic>Voltage</topic><toplevel>online_resources</toplevel><creatorcontrib>Di Lillo, L</creatorcontrib><creatorcontrib>Malatto, L</creatorcontrib><creatorcontrib>Giménez, G</creatorcontrib><creatorcontrib>Mangano, E</creatorcontrib><creatorcontrib>Fraigi, L</creatorcontrib><creatorcontrib>Laiz, H</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Di Lillo, L</au><au>Malatto, L</au><au>Giménez, G</au><au>Mangano, E</au><au>Fraigi, L</au><au>Laiz, H</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Fabrication of a thin-film thermal converter with resistive sensing</atitle><btitle>CPEM 2010</btitle><stitle>CPEM</stitle><date>2010-06</date><risdate>2010</risdate><spage>163</spage><epage>164</epage><pages>163-164</pages><issn>0589-1485</issn><eissn>2160-0171</eissn><isbn>9781424467952</isbn><isbn>1424467950</isbn><eisbn>9781424467976</eisbn><eisbn>1424467977</eisbn><eisbn>9781424467969</eisbn><eisbn>1424467969</eisbn><abstract>A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO 2 ). This paper presents details of the fabrication process and materials selection.</abstract><pub>IEEE</pub><doi>10.1109/CPEM.2010.5543788</doi><tpages>2</tpages></addata></record>
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source	IEEE Electronic Library (IEL) Conference Proceedings
subjects	Biomembranes Bridge circuits Conductivity Fabrication Resistors Silicon Temperature sensors Thermal resistance Transistors Voltage
title	Fabrication of a thin-film thermal converter with resistive sensing
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-21T13%3A19%3A17IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Fabrication%20of%20a%20thin-film%20thermal%20converter%20with%20resistive%20sensing&rft.btitle=CPEM%202010&rft.au=Di%20Lillo,%20L&rft.date=2010-06&rft.spage=163&rft.epage=164&rft.pages=163-164&rft.issn=0589-1485&rft.eissn=2160-0171&rft.isbn=9781424467952&rft.isbn_list=1424467950&rft_id=info:doi/10.1109/CPEM.2010.5543788&rft_dat=%3Cieee_6IE%3E5543788%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=9781424467976&rft.eisbn_list=1424467977&rft.eisbn_list=9781424467969&rft.eisbn_list=1424467969&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5543788&rfr_iscdi=true