Fabrication of a thin-film thermal converter with resistive sensing

Fabrication of a thin-film thermal converter with resistive sensing

A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO 2 ). This paper presents details of the fabrication process and materials selection.

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Bibliographische Detailangaben
Hauptverfasser: Di Lillo, L, Malatto, L, Giménez, G, Mangano, E, Fraigi, L, Laiz, H
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biomembranes
Bridge circuits
Conductivity
Fabrication
Resistors
Silicon
Temperature sensors
Thermal resistance
Transistors
Voltage
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Beschreibung
Zusammenfassung:A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO 2 ). This paper presents details of the fabrication process and materials selection.
ISSN:0589-1485
2160-0171
DOI:10.1109/CPEM.2010.5543788