IC MEMS microtransducers

IC MEMS microtransducers

This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.

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Bibliographische Detailangaben
Hauptverfasser: Baltes, H., Paul, O., Korvink, J.G., Schneider, M., Buhler, J., Schneeberger, N., Jaeggi, D., Malcovati, P., Hornung, M., Hiberli, A., von Arx, M., Mayer, E., Funk, J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biomembranes
CMOS integrated circuits
CMOS process
CMOS technology
Dielectric substrates
Etching
Magnetic anisotropy
Micromachining
Micromechanical devices
Silicon
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Beschreibung
Zusammenfassung:This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.
ISSN:0163-1918
2156-017X
DOI:10.1109/IEDM.1996.553858