Wide Bandwidth Silicon Nitride Grating Coupler

We demonstrate a one-dimensional grating coupler in silicon nitride with a 67-nm 1-dB bandwidth, the largest reported for a grating coupler butt-coupled to standard single-mode fiber. The peak coupling efficiency is -4.2dB. It requires no partial etch and requires only 0.6-μm fabrication resolution....

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Veröffentlicht in:	IEEE photonics technology letters 2010-10, Vol.22 (19), p.1461-1463
Hauptverfasser:	Doerr, Christopher R, Long Chen, Young-Kai Chen, Buhl, Larry L
Format:	Artikel
Sprache:	eng
Schlagworte:	Bandwidth Conferences Coupling circuits Diffraction gratings Etching Fiber gratings Fiber optics Grating coupler Gratings (spectra) integrated optics Joining Optical coupling optical fiber Optical fiber couplers Optical fiber polarization Optical fibers Optical waveguides Semiconductor waveguides Silicon Silicon nitride
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Beschreibung
Zusammenfassung:	We demonstrate a one-dimensional grating coupler in silicon nitride with a 67-nm 1-dB bandwidth, the largest reported for a grating coupler butt-coupled to standard single-mode fiber. The peak coupling efficiency is -4.2dB. It requires no partial etch and requires only 0.6-μm fabrication resolution.
ISSN:	1041-1135 1941-0174
DOI:	10.1109/LPT.2010.2062497