Optical emission spectroscopy of a two-di mensaional capillary discharge array

Summary form only given. Capillary discharge is the primary apparatus for atmospheric pressure discharge plasma. Most atmospheric pressure plasma devices are point or line type because the difficulty of forming a two dimensional array mainly lies in the current supply capability of the power supply....

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Hauptverfasser: Max Chung, Shiaw Huei Chen, Yung Chih Chen, Ming Sung Yang
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Summary form only given. Capillary discharge is the primary apparatus for atmospheric pressure discharge plasma. Most atmospheric pressure plasma devices are point or line type because the difficulty of forming a two dimensional array mainly lies in the current supply capability of the power supply. We constructed a two dimensional atmospheric pressure plasma array based on series connected capillary discharge. Each capillary device is composed of a metal tube and a plate on one end, and a perforated acrylic dielectric plate serves as barrier lies adjacent to this metal. A metal at the bottom serves as the other electrode. Total more than 50 of these capillary discharge tubes forms a roughly 20 × 20 cm atmospheric pressure plasma source. When turned on, a more or less uniform atmospheric pressure plasma forms provided enough power is supplied. Optical emission is used to diagnose the species at different power setting. At higher power, the OES spectrum displays a broad dark body radiation be sides individual Nitrogen lines, which indicates the heating of the dielectric and its emission.
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.2010.5534207