A first look into plasma-plasma interaction at atmospheric pressure via numerical simulation

Summary form only given. The micro plasma array developed by J.G. Eden and co-workers consists of a matrix of hollow cathode discharges of the size of a few ten micro meters. A silicon substrate with inverse pyramidal cavities is used as one electrode. The second electrode, separated by a dielectric...

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Hauptverfasser: Wollny, Alexander, Hemke, Torben, Gebhardt, Markus, Mussenbrock, Thomas, Brinkmann, Ralf Peter
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Summary form only given. The micro plasma array developed by J.G. Eden and co-workers consists of a matrix of hollow cathode discharges of the size of a few ten micro meters. A silicon substrate with inverse pyramidal cavities is used as one electrode. The second electrode, separated by a dielectrica, covers the space between cavities. The whole structure is covered with a second dielectric layer. The discharges are driven by a sinusoidal voltage at a frequency of 10-100 kHz in atmospheric pressure Argon. Experiments performed by Schulz-von der Gathen and co-workers show strong interactions between the the micro discharges. The fundamental phenomenon is still unclear. This contribution is intended to show a first look into the modeling and simulation of micro plasma array and the plasma-plasma interaction.
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.2010.5534168