Numerical simulation of an rf driven micro-plasmajet at atmospheric pressure

Summary form only given. An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of appli...

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Bibliographische Detailangaben

Hauptverfasser:	Hemke, Torben, Wollny, Alexander, Gebhardt, Markus, Brinkmann, Ralf Peter, Mussenbrock, Thomas
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Atmospheric modeling Atmospheric-pressure plasmas Chemistry Fault location Geometrical optics Geometry Numerical simulation Plasma density Plasma devices Radio frequency
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