Numerical simulation of an rf driven micro-plasmajet at atmospheric pressure

Numerical simulation of an rf driven micro-plasmajet at atmospheric pressure

Summary form only given. An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of appli...

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Bibliographische Detailangaben
Hauptverfasser: Hemke, Torben, Wollny, Alexander, Gebhardt, Markus, Brinkmann, Ralf Peter, Mussenbrock, Thomas
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Atmospheric modeling
Atmospheric-pressure plasmas
Chemistry
Fault location
Geometrical optics
Geometry
Numerical simulation
Plasma density
Plasma devices
Radio frequency
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Beschreibung
Zusammenfassung:Summary form only given. An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of applications contains - among others - the wide field of surface modifications, light sources, steriliztation and display panels.
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.2010.5534160