A MEMS Universal Fluid Quality Interrogation Sensor

A MEMS Universal Fluid Quality Interrogation Sensor

This paper describes the design of a silicon chip that integrates multiple sensors together to monitor a variety of fluid quality parameters. The MEMS universal fluid quality interrogation sensor (MUFINS) eliminates the need to design a new chip for every fluid that requires quality control. The MUF...

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Bibliographische Detailangaben
Hauptverfasser: Purrington, H M, Puchades, I, Baylav, M, Fuller, L F
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Condition monitoring
Conductivity measurement
Humidity measurement
Micromechanical devices
Quality control
Semiconductor device measurement
Sensor phenomena and characterization
Silicon
Temperature measurement
Temperature sensors
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Beschreibung
Zusammenfassung:This paper describes the design of a silicon chip that integrates multiple sensors together to monitor a variety of fluid quality parameters. The MEMS universal fluid quality interrogation sensor (MUFINS) eliminates the need to design a new chip for every fluid that requires quality control. The MUFINS chip is capable of measuring temperature, viscosity, liquid level, humidity, conductivity, pH, chlorine, and optical properties such as color and turbidity.
ISSN:0749-6877
2375-5350
DOI:10.1109/UGIM.2010.5508919